Microsystem Technology

Microsystem technology requires small but very precise components – even the tools for their production are subject to this claim. With the help of high-precision, partly ultrasound-guided CNC grinding the BCE power transformer, tongues and locating manufactures to within a few microns. The claim of a technical ceramic in this technology relates generally to the wear resistance in order to obtain the high precision as long as possible. As tech material comes in most cases ZrO2 used as can be here realize precise surfaces in conjunction with great toughness and strength. In addition, the adjusted coefficient of thermal expansion correlates perfectly with the steel materials most commonly used.

But the green machining opens up possibilities that are impossible or very difficult to achieve with the aid of grinding technology: an electrically insulating sample holder at application temperatures of max. 2,000 °C (application in the UHV range) a 2.5 mm x 2.5 mm x 12 mm large component with 6 continuous-M1.2 internal threads from A-997 was realized.

High Temperature Analysis Crucible

Wear-resistant components for semiconductor handling systems

Application examples:

Thermal insulating components