Technical Ceramics for Microsystem Technology

DIMENSIONALLY STABLE IN THE µm RANGE, WEAR-RESISTANT, PRECISETechnical Ceramics for Microsystem Technology

In microsystem technology, dimensional stability determines function. Components are small, required tolerances are in the µm range, and this precision must be maintained throughout the entire service life.

We clarify before the quote whether a component is designed appropriately for ceramics and which material will reliably support the required accuracy over time.

  • Tolerances in the µm range through hard machining after firing
  • Wear-resistant – precision is maintained throughout the service life
  • Thermal expansion of ZrO₂ close to common steel materials
  • Electrically insulating, non-magnetic, UHV-compatible
  • Manufacturing from batch size 1

QUICK STARTHow would you like to get started?

Identify challenges

Wear, dimensional stability or insulation: check where your current solution reaches its limits.

View challenges

Find the right material

ZrO₂, Al₂O₃ or a specialty material: we identify what suits your geometry and load profile.

View materials

Go straight to enquiry

Drawing or sketch available? We clarify feasibility and tolerances upfront.

Start enquiry

TYPICAL PROBLEMSChallenges in Microsystem Technology

Dimensional stability in the µm range

Tight tolerances are not achieved through the sintering process but only through precision hard machining after firing.

Wear on precision surfaces

Even minor abrasion destroys the required accuracy in microsystem technology. Metallic materials often fail to achieve the necessary service life.

Filigree geometries and thin webs

Thin wall thicknesses, sharp internal contours and bores in the sub-millimetre range quickly reach the limits of standard materials.

Electrical insulation in confined spaces

In tight spaces, insulators must provide voltage-proof separation while remaining mechanically and thermally loadable.

Thermal expansion in steel assemblies

Differing coefficients of thermal expansion lead to loss of fit or jamming in mixed assemblies across temperature cycles.

Dimensional stability, wear or insulation in confined spaces – which requirement is your priority?

Tell us your geometry, required tolerance and installation situation. We assess material and feasibility.

SOLUTION LOGICWhy is technical ceramics used in microsystem technology?

Special ceramics for microsystem technology, high temperature analysis crucible
High temperature analysis crucible

Advantages of technical ceramics:

  • Hardness keeps precision surfaces dimensionally stable over long service lives
  • ZrO₂ combines strength and toughness even at small cross-sections
  • Thermal expansion close to steel – stable fit in mixed assemblies
  • Electrically insulating and non-magnetic
  • Suitable for use in ultra-high vacuum
Special ceramics for microsystem technology, wear-resistant components for semiconductor handling systems
Wear-resistant components for semiconductor handling systems

BCE expertise for your project:

  • Ultrasonic-assisted CNC grinding down to the µm range
  • Green machining for geometries that cannot be achieved by grinding alone
  • Through-hole internal threads from M1.2 in components of just a few millimetres edge length
  • Material consultation before the quote
  • Prototype in the same process as the series part

Typical mistakes in microsystem technology:

  • Confusing sintering tolerance with final tolerance: ceramics shrinks more than 10 % during firing – tight dimensions are only achieved through hard machining
  • Transferring a metal geometry 1:1 without designing sharp edges, thin webs and internal threads appropriately for ceramics
  • Selecting material based on hardness alone without checking the thermal expansion relative to the steel pairing

Those who align tolerance concept and geometry early avoid grinding rework and scrap at small batch sizes.

MATERIALSSuitable materials for microsystem technology

Zirconia (ZrO₂)

When suitable:
First choice for filigree, mechanically loaded precision parts; high strength and toughness; thermal expansion close to steel.

Less suitable:
Continuous operation above 900 °C; note phase transformation under temperature cycling.

Alumina (Al₂O₃)

When suitable:
Insulation and wear applications under moderate load; cost-effective; available in high purity for sensor applications.

Less suitable:
High-dynamic impact or bending loads on thin webs.

Mixed oxides (ATZ / ZTA)

When suitable:
When Al₂O₃ is too brittle and ZrO₂ is not economically necessary; balanced combination of strength and toughness.

Less suitable:
When the requirement is cleanly covered by ZrO₂ or Al₂O₃ alone – in those cases the simpler materials are more economical.

Specialty materials (SiC, Si₃N₄, AlN, B₄C)

When suitable:
High thermal conductivity (AlN) for substrate carriers; extreme temperatures and maximum wear resistance.

Less suitable:
More complex and expensive to manufacture than oxide ceramics.

KEY FACTSTechnical specifications at a glance

a few µm

achievable manufacturing tolerance through grinding and lapping after firing.

> 10 %

sintering shrinkage during firing. Final dimensions are achieved through hard machining, not through the sintering process.

< 0.5 mm

realised diameter of push rods made from ZrO₂.

M1.2

through-hole internal threads in a component measuring 2.5 × 2.5 × 12 mm made from A-997.

non-magnetic

ZrO₂ and Al₂O₃ do not interfere with electronic or magnetic measurements.

PRACTICAL EXAMPLESRealised ceramic components from microsystem technology

  • Force transmitters and tongues, ultrasonically ground to within a few µm
  • Electrically insulating sample holder with six through-hole M1.2 internal threads made from A-997, component dimensions 2.5 × 2.5 × 12 mm, for UHV applications, operating temperature up to 1,750 °C
  • Positioning pins made from ZrO₂
  • Push rods with a diameter below 0.5 mm made from ZrO₂

FAQFrequently asked questions from microsystem technology

Answers to typical questions on tolerances, minimum dimensions, electrical insulation and dimensional stability of ceramic micro components.

What tolerances are achievable with ceramic micro components?

Tolerances in the µm range are achievable, but not directly from the sintering process. Ceramics shrinks more than 10 % during firing; sintered alone, dimensions are typically within approximately one to two percent. Tight final tolerances are achieved through hard machining after firing – that is, through grinding, lapping and polishing. Which tolerance is functionally necessary and economically sensible is clarified before the quote based on function and geometry.

What minimum dimensions are possible with ceramic micro components?

Realised examples include push rods with a diameter below 0.5 mm and through-hole M1.2 internal threads in components of just a few millimetres edge length. This is made possible by ultrasonic-assisted CNC grinding, supplemented by green machining for geometries that cannot be produced by grinding alone.

Are ceramic micro components electrically insulating and non-magnetic?

Yes. Oxide ceramics such as ZrO₂ and Al₂O₃ provide reliable insulation and are non-magnetic. This is relevant in sensor technology, measurement technology and semiconductor handling. For ultra-high vacuum, BCE offers suitable materials such as A-997: no relevant outgassing, electrically insulating and mechanically stable down to the µm range.

How is dimensional stability maintained throughout the entire service life?

With ceramic precision components, maintaining dimensional stability throughout the service life is the actual design challenge. ZrO₂ does not lose its geometry through abrasion the way hardened steel does, because its hardness is significantly higher. What is nonetheless decisive is the material pairing in contact: a ceramic against a surface that is too soft can abrade it. The design of the tribological pairing is part of the material consultation before the quote.

What does M1.2 mean – and why is it a demanding thread in ceramics?

M1.2 is a metric thread designation according to ISO: the number indicates the nominal diameter in millimetres. An M1.2 thread therefore has an outer diameter of only 1.2 mm – roughly as fine as the lead of a mechanical pencil. In steel it can be produced with a tap; in ceramics it cannot: the brittle material would fracture during conventional thread cutting. Such threads are produced at BCE either through green machining before firing or through specialised hard machining. Six through-hole M1.2 threads in a component measuring 2.5 × 2.5 × 12 mm illustrate how precisely BCE manufactures in the field of microsystem technology.

Still unsure whether ceramics is the right choice for your micro component?

A brief conversation is enough to assess feasibility and material.